Double sided probing structures

ABSTRACT

A test configuration for double sided probing of a device under test includes a holder to secure the device under test in a first orientation, a calibration substrate secured in a second orientation and a probe capable of calibration using the calibration substrate and probing the device under test.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application claims the benefit of U.S. Provisional Application No.60/609,605, filed Sep. 13, 2004.

BACKGROUND OF THE INVENTION

The present application relates to probing.

Characterizing the actual performance of high speed integrated circuitbased systems requires accurate knowledge of the electricalcharacteristics of the wafer forming the integrated circuit,characteristics of the integrated circuit itself, characteristics of thepackage into which the integrated circuit is placed, characteristics ofthe circuit board or support upon which the integrated circuit issupported, and characteristics of the interconnect structures whichinterface both the integrated circuit with the package and the packagewith the circuit board. These electrical characteristics, which arefrequently the subject of measurement, include cross-coupling withneighboring lines, spectral dispersion, electrical resonances, and lossby radiation into the surrounding dielectric.

Traditional measuring stations are constructed to support a device undertest, such as an integrated circuit board or package, in a horizontalposition. This arrangement provides direct physical access to theprobing device from only a single side of the package. Simultaneousaccess to both sides of a circuit board or package is accordinglyunavailable in such test structures. Specially constructed mountingcards are sometimes used which not only hold a package but also attemptto provide all connections on the top of the card for physical access toprobing. The use of package mounting cards introduce effects into themeasurement data which are not due to the package or its interconnects.These effects must, themselves, be determined and either compensated foror modeled into the final analysis of the data. Regardless, of how theseeffects are handled, they degrade both the efficiency and accuracy ofthe resulting package electrical characterization.

GigaTest Labs provides a GTL 5050 Probe Station that facilitates probingon opposite sides of a printed circuit board. A calibration substrate issupported in a horizontal orientation by the horizontal support. Theprobes are supported by the horizontal support and aligned in anopposing relationship with respect to the calibration substrate.Thereafter, the probes are calibrated using the calibration substrate todetermine calibration parameters, such as a set of S parameters. Thecalibration parameters are used in further measurements to calibrateprimarily for the effects of the cables and probe so that thecharacteristics of the device under test can be determined. One of theclamps is then clamped to the horizontal support of the station in aposition suitable for testing one side of the circuit board. Thehorizontal support including the clamped probe is then flipped over. Theother clamp is then clamped to the now upper side of the horizontalsupport of the station in a position suitable for testing the other sideof the circuit board. While functional, the significant movement of theprobes necessary for positioning and the flipping of the tablenecessitates long cables, which introduce error into the calibration.

BRIEF DESCRIPTION OF THE SEVERAL VIEWS OF THE DRAWINGS

FIG. 1 illustrates a horizontal calibration substrate and a verticaldevice under test.

FIG. 2 illustrates a probe positioner.

FIG. 3 illustrates the probe positioner of FIG. 2 in a differentorientation.

FIG. 4 illustrates a horizontal calibration substrate and a horizontaldevice under test.

FIG. 5 illustrates a vertical calibration substrate and a verticaldevice under test.

FIG. 6 illustrates a vertical calibration substrate and a horizontaldevice under test.

FIG. 7 illustrates a lateral plate assembly interconnected to a guardpotential.

FIG. 8 illustrates a pair of plate assemblies interconnected to a guardpotential.

FIG. 9 illustrates a vertical sliding plate assembly interconnected(both sides of device under test) to a guard potential.

FIG. 10A-NN illustrate further embodiments.

DETAILED DESCRIPTION OF PREFERRED EMBODIMENT

The present inventors considered the available dual sided probingsolutions and came to the realization that a probing solution thatpermits dual sided probing with minimal reconfiguration of the probestation would be advantageous for increasing the probing efficiencywhile simultaneously increasing calibration accuracy. Referring to FIG.1 as an initial matter it was determined that the device under test 30is preferably supported by a holder 10 that is in a verticalorientation, such as substantially 90 degrees with respect to ahorizontal support 20. The device under test 30, may include anysuitable device, such as for example, pogo-pin contactors, grid ballarray package I/Os and vias, test sockets, via arrays, printed circuitboards, and thru paths of transmission lines that traverse right-angleboard to board connectors. In addition, a differential impedance testmay be performed. The vertical orientation of the device under test 30reduces the size of the probing system and permits effective use of amicroscope 40 to view both sides of the device under test 30.

In order to perform calibrated tests, the probing system includes asubstrate support 50 for a calibration substrate 60. The calibrationsubstrate includes one or more calibrated structures thereon whichfacilitate the calibration of one or more probes. The calibrationsubstrate is preferably substantially parallel to the horizontal support20. A pair of probe positioners 70 and 80 (see FIG. 2) are aligned withthe calibration substrate 60. Each of the probe positioners 70 and 80typically includes a probing element 100 and 105 which includes arespective contacting portion at the end thereof. The probing contactingportion normally includes a plurality of aligned probing contacts.Therefore, the theta of each set of probing contacts is adjusted usingthe theta adjustment of the probe positioner to align the probingcontacts with the surface of the calibration substrate. In this manner,all of the probing contacts come into proper contact with thecalibration substrate (otherwise one or more probe contacts may not makeproper contact). The calibration is normally a vector calibration usinga vector network analyzer.

The probe positioners 70 and 80 are then repositioned on the horizontalsupport 20 in a position proximate each side of the device under test30. A stand 72 (or multiple stands) may be used, if desired. While someexisting probes may permit the re-orientation of the probing contacts toa different position, it takes significant time to adjust theorientation of the probing contacts sufficiently in line with the deviceunder test 30 for successful probing. In addition, since the adjustmentfrom one orientation to another is normally along a continuous axis ofrotation, it is problematic to sufficiently align the probing contactswith the surface of the device under test 30 so that proper probingcontact is made. If the probe contacts are slightly out of alignment,then the test will either not function at all or appear to functionproperly but actually be providing inaccurate results. Further, if theuser needs to make multiple touch downs on the same pad to properlyalign the probing contacts with the pads on the device under test, thenthere is a significant probability that the pads on the device undertest will be damaged, resulting in either a damaged device under test orotherwise inaccurate measurements.

To alleviate this probe alignment limitation the present inventors cameto the realization that the probe should include a structure thatpermits defined movement from a horizontal probing orientation to avertical probing orientation. In this manner, the probe contacts movefrom a first orientation to a second orientation with certainty that theorientations have a predefined angular relationship between them, suchas 90 degrees.

Referring to FIG. 2, the probe positioner 70 (80) may include a probingelement 100 with contacting elements. Typically the probing element 100includes a coaxial cable with a plurality of contacting elementsconnected to the end thereof. The probing element 100 is supporting by aprobe support 102. The probe support 102 may be rotatably connected 106to a support fixture 104, such as with a pin that may be tightened tosecure the probe support 102 in place. This interconnection 106 providesfor adjustability in the location of the probing contacts and theirangular contact to the device under test.

The support fixture 104 is interconnected to a theta adjustmentstructure 108 that includes a knob 111 that, when turned, adjusts thetheta orientation of the probing elements. The theta adjustmentstructure 108 is secured to a plate 110. The plate 110 includes a set ofopenings therein which match openings in a pivot block 112 so that theplate 110 may be secured to the pivot block 112. In FIG. 2, the probingelement 100 is oriented in a horizontal orientation. In order to providea convenient manner of adjusting the probing element 100 to a differentpredetermined orientation, the pivot block 112 is mounted to a hinge114. When the user desires to change the orientation of the probingelement 100, the user may remove a pin 115 which permits the pivot block112 to pivot around the hinge 114 to a second position where the pin 115is replaced to secure the pivot block 112 in a fixed position, asillustrated in FIG. 3. The result of removing the pin 115 and pivotingthe pivot block 112, is to change the orientation of the probing element100 by a predetermined angle, such as 90 degrees. Other fixed positionalmovements may likewise be used depending on the particular applicationand orientation of different portions of the probe station.

With the probing element 100 oriented in a vertical direction, asillustrated in FIG. 3, the probe is suitable for being calibrated on acalibration substrate that is in a horizontal orientation. Thecontacting members may be properly adjusted to achieve a uniform contactwith the calibration substrate. Thereafter, the probe may be readilymodified to a horizontal orientation using the hinge 114 with a 90degree adjustment. The device under test 30 has a vertical orientation,so the probe as illustrated in FIG. 3, after rotation, is thus in asuitable position for testing. The probe may be moved on the horizontalsupport 20, as necessary, to position the probing contacts near thedevice under test. With the 90 degree adjustment being known, which isthe angular relationship between the calibration substrate 60 and thedevice under test 30, the probing contacts will be in the properalignment for testing the device under test 30. In this manner, noadditional adjustment of the probing contacts theta alignment istypically necessary and the pads on the device under test 30 will notlikely be worn through attempting to achieve proper alignment of theprobing contacts. In addition, each of the probe positioners may berotated in a different direction so that suitable contact may be made toeach side of the device under test 30.

In addition, a plurality of faces of the pivot block 112 may include aset of holes therein so that the plate 110 may be secured to differentfaces of the pivot block 112, as desired. In this manner, the rotationof the pivot block 112 may achieve different orientations of the probe.

The hinge 114 is affixed to another support 116. The support 116 mayinclude a pair of opposing groves 118 and 120 defined therein. Byloosening a screw 122, the support 116 may freely slide up and down theplate 124, and is secured in place by tightening the screw 122. In thismanner, the height of the plate 116 may be readily adjusted. Theopposing groves 118 and 120 also permit the plate 116 to be completelydisengaged from the plate 124 then the plate 116 (and attached probingelements) may be rotated 90 degrees, 180 degrees, or 270 degrees, andthen engaged with the plate 124 in a different orientation. Thisprovides another manner for adjusting the orientation of the probe foralignment with a calibration substrate and a device under test.

The plate 124 is secured to an x-y-z adjustment mechanism 126 that mayshift the probe by using a respective knobs 132, 130, and 128. In thismanner, fine adjustments of the x-y-z orientation of the probe 100 maybe performed by the user for probing the device under test.

Referring to FIG. 4, an alternative orientation is illustrated thatmakes effective use of the probe positioners described herein. Thecalibration substrate is maintained in a horizontal orientation, and theprobes are calibrated. Thereafter one of the probe positioners isoriented to probe the top of the device under test, which is the sameorientation of the probe as is used for calibration. The probingcontacts of the other probe positioner are rotated 180 degrees, and thenoriented to probe the bottom of the device under test. In this manner,the device under test may be effectively probed.

Referring to FIG. 5, another alternative orientation is illustrated thatmakes effective use of the probe positioners described herein. Thecalibration substrate 60′ is maintained in a vertical orientation on thesupport 50′, and the probes are calibrated. Thereafter one of the probepositioners is oriented to probe the side of the device under test,which is the same orientation of the probe as is used for calibration.The probing contacts of the other probe positioner are rotated 180degrees, and then oriented to probe the other side of the device undertest. In this manner, the device under test may be effectively probed.

Referring to FIG. 6, another alternative orientation is illustrated thatmakes effective use of the probe positioners described herein. Thecalibration substrate 60″ is maintained in a vertical orientation on thesupport 50″, and the probes are calibrated. Thereafter one of the probepositioners is oriented to probe the top of the device under test. Theprobing contacts of the other probe positioner are rotated and thenoriented to probe the other side of the device under test. In thismanner, the device under test may be effectively probed.

It is to be understood, that depending on the orientation of the probepositioners including the probing element, calibration substrate, andthe device under test with respect to one another together with respectto the orientation of the probe positioners when positioned forsubsequent probing, the modification of the orientation of the probingelement (if modified) may change.

Traditionally, the measurements used to simultaneously test two sides ofa vertically oriented structure have been sufficient to obtain desirableresults. However, in the case of attempting to characterize especiallylow noise characteristics it has been determined that the noise levels,in some cases, are to large. In such a case it has been determined thatthe addition of guarding structures around the vertically orientedprobing device would be advantageous. The guarding structures areconductive members that are provided with a potential that tracks, orotherwise approximates, the potential in the signal path. In thismanner, the leakage from the signal path is reduced. Referring to FIG.7, a modified vertical support structure includes an exterior ring 200that is provided with a guard potential of a signal path. The exteriorof the ring is preferably insulated from other conductive members. Inaddition, the exterior ring preferably encircles a majority of thedevice under test on one or more sides of the device under test.Referring to FIG. 8, for one or both of the exterior surfaces of thedevice under test a conductive plate assembly 210 may be provided,within which the probes test the device under test, and each of theconductive plates may be connected to a guard potential of a signalpath. For example, the potential of the conductive plate proximate therespective probe may be interconnected to a guard representative of thesignal path of the respective probe.

Referring to FIG. 9, a modified structure includes a set of verticallyoriented interconnected slidable plates 230 that define an opening 240therein through which the probe tests the device under test. The plates230 may be provided on one or both sides of the device under test. Theopening 240 may shift such that other regions of the device under testmay be tested. In this manner, the device under test has a significantregion that is of a guard potential.

Referring to FIGS. 10A-NN, other embodiments are illustrated.

The terms and expressions which have been employed in the foregoingspecification are used therein as terms of description and not oflimitation, and there is no intention, in the use of such terms andexpressions, of excluding equivalents of the features shown anddescribed or portions thereof, it being recognized that the scope of theinvention is defined and limited only by the claims which follow.

We claim:
 1. A probing structure comprising: (a) a holder for supportinga device under test; (b) a calibration substrate including a calibrationstructure surface; (c) a probe element including a contacting portion;and (d) a probe positioner supporting said probe element, said probeelement supportable in a first orientation enabling said contactingportion to engage said calibration structure surface and, alternatively,supportable in a second orientation enabling said contacting portion toengage said device under test, said probe positioner comprising a standand a pivot block hingedly connected to said stand, said standcomprising an adjustment mechanism enabling translation of said pivotblock in at least one direction without movement of said stand, saidprobe element affixed to said pivot block.
 2. A probing structurecomprising: (a) a holder for supporting a device under test; (b) acalibration substrate including a calibration structure surface; (c) aprobe element including a contacting portion; and (d) a probe positionersupporting said probe element, said probe element supportable in a firstorientation enabling said contacting portion to engage said calibrationstructure surface and, alternatively, supportable in a secondorientation enabling said contacting portion to engage said device undertest, said probe positioner comprising a stand and a pivot blockhingedly connected to said stand enabling pivoting of said pivot blockbetween a first predefined angular relationship with said stand and asecond predefined angular relationship with said stand, said probeelement affixed to said pivot block.
 3. The probing structure of claim 2wherein said pivoting of said pivot block is securable in at least oneof said first predefined angular relationship and said second predefinedangular relationship by a pin engageable simultaneously with said pivotblock and said stand.
 4. A probe station comprising: (a) a probe stationsupport; (b) a holder for supporting a device under test having a firstprobe pad on a first side and a second probe pad on a second side ofsaid device under test, said holder supporting said device under test onsaid probe station support such that said first probe pad and saidsecond probe pad are simultaneously accessible for probing; (c) acalibration substrate including a calibration structure surface, saidcalibration substrate supported by said probe station support; (d) aprobe element including a contacting portion; and (e) a probe positionersupporting said probe element on said probe station support, said probeelement supportable in a first orientation to said probe station supportenabling said contacting portion to engage said first probe pad andmovable, without movement of said probe positioner relative to saidprobe station support, to a second orientation to said probe stationsupport to enable engagement with at least one of said second probe padand said calibration structure surface.
 5. The probe station of claim 4wherein said first side and said second side of said device under testare arranged substantially normal to said probe station support and saidcalibration structure surface is arranged substantially parallel to saidprobe station support.
 6. The probe station of claim 4 wherein saidfirst side and said second side of said device under test are arrangedsubstantially parallel to said probe station support and saidcalibration structure surface is arranged substantially normal to saidprobe station support.
 7. The probe station of claim 4 wherein saidfirst side and said second side of said device under test and saidcalibration structure surface are arranged substantially parallel tosaid probe station support.
 8. The probe station of claim 4 wherein saidfirst side and said second side of said device under test and saidcalibration structure surface are arranged substantially normal to saidprobe station support.
 9. The probe station of claim 4 wherein saidprobe positioner comprises: (a) a stand supported by said probe stationsupport; and (b) a pivot block hingedly connected to said stand, saidprobe element affixed to said pivot block.
 10. The probe station ofclaim 9 wherein said stand comprises an adjustment mechanism enablingtranslation of said pivot block in at least one direction withoutmovement of said stand on said probe station support.
 11. The probestation of claim 9 wherein said hinged connection enables pivoting ofsaid pivot block between a first predefined angular relationship withsaid probe station support and a second predefined angular relationshipwith said probe station support.
 12. The probe station of claim 11wherein said pivoting of said pivot block is securable in at least oneof said first predefined angular relationship and said second predefinedangular relationship by a pin engageable simultaneously with said pivotblock and said stand.